首頁 > Stream Jet (In line machine)  > SL 系列(晶圓級Underfill精密塗膠設備)
SL 系列(晶圓級Underfill精密塗膠設備)

Model SL Stream Jet series is an ultra-high precision dispensing robot. The reasons which make SL series so special are attributed to 100% self-developed core technologies by SSI for real 5 axis motion control software, special vision algorithms and ±1 um repeatability accuracy hardware design capabilities. To meet the challenge of complicated manufacturing process, Z axis is designed to hold as high as 15kg load for CCD camera/ different lighting devices/jet valve/laser height sensor/Z axis rotation mechanism/ fluid reservoir/ heating device and UV curing light. SL series is still capable to run at 1G acceleration and the speed of 1500 mm/sec on XY axis with the accuracy of ±2~3 um even under critical dispensing applications.
SL series not only has the best hardware specifications but also the most advanced and sophisticated motion control and vision software to meet critical process needs such as 3 D continuous surface height detection, fiducial on fly, versatile image recognition methods and algorithms for critical alignment and inspection, panoramic image for remote teaching, dispensing weight auto calibration, DXF file download and smart editing as well as many other features developed for critical dispensing environments and conditions.
SL series also supports post glue inspection after dispensing for any kind of glue and substrate background to eliminate the cost from defective dispensing as a result of customized algorithms and software modification for individual process. SSI unique glue inspection capability is completely different from competitors approach using available standard vision solution in the market, which often ends with high percentage of false inspection and creates defects. SL series customized vision inspection capability can assure 98-99 % detection rate after dispensing process and increases overall yield.
With all above hardware, software and vision capabilities, SL series is the best choice for applications for semiconductor packaging such as wafer level underfill, EMI shielding, wafer defective chip inspection as well as applications which need using most sophisticated SSI half-touch Deposition Jet for micro dots or line width less than 100 um.
To meet in-line production requirement, SL series also provides loader and unloader system as an option for conveyor with tray, cassette, magazine, wafer cassette and FOUP.
 

 

Specifications 規格說明:
XYZ加工範圍 Working Area SL : 440mm x 600mm x 100mm
XY軸加速度 0.5G~1G
XY軸速度 500mm/sec
Z軸速度 320mm/sec
XYZ軸重複精度 ±3µm
影像軟體功能 Auto-position Calibration 影像自動對位
Motion Mode 動態恆速功能 / 雙閥自動分配與校正
Vision teach (include Mirror and Rotate) 影像教導(含鏡射與旋轉)
Multi-board alignment 多層次基板對位
Auto dispensing route optimization 點膠路徑優化
Continuous route location calibration 多點位連續塗佈
CAD import CAD檔輸入
Active manual alignment after auto vision alignment 自動校正後手動位置調整
最大負載 Z軸 : 15kg
點膠裝置 Jet Valve
Hot Melt Jet Valve
Progressive cavity pump (Mono Pump)
標準裝置 Stream Vision with auto-position Calibration Stream Vision 自動對位影像系統
Vision on the Fly 飛躍辨識
Jet-on Fly (JOF) function 飛躍噴膠
Motion Mode 動態恆速功能 / 雙閥自動分配與校正
Tip Auto Calibration 針頭自動校正
Laser height sensor for location alignment 多點位雷射測高系統
Clean station 針頭清潔裝置
Closed loop weight calibration 閉迴路膠重自動回饋補正系統
Multi dispensing parameter setting 即時多組點膠參數切換使用
Heat stage(~100C) 加熱站
選擇裝置 Customized vision alignment software and algorithm 客製對位數學演算及軟體
Post dispense inspection 點膠後光學檢測
Multitrack 多軌裝置
Other customized function is available 其他客製化軟硬體功能
Pre/Post heat stage 預熱/保溫站
SSI Dispensing 4.0 SSI點膠工業4.0功能